Clean Room

The cleanroom (at Building 115- Room#124/125):

syskey technology

Plasma Etch System

ELGA LabWater

PURELAB^®Option-Q

Sawatec

LRD-250 Rins Dryer

Sawatec

Combi-SM200-HP200

EVG

EVG610 Semi-Automated Mask Alignment System

YES

User-friendly plasma cleaning systems provide higher yields and repeatable results.

Veeco

Veeco di Innova Atomic Force Microscope

OPTO/SYSTEM CO,LTD

LD Diamond Scriber【OSM-90TP】

Hybond

Model 626

ZEISS

Gemini Scanning Electron Microscope

ZEISS

Gemini Scanning Electron Microscope